Metallic wire grid polarizer and manufacturing method thereof

ABSTRACT

The present invention provides a metallic wire grid polarizer and a manufacturing method thereof. The metallic wire grid polarizer of the present invention includes a base plate ( 10 ) and a plurality of metallic wire grids formed on the base plate ( 10 ). The metallic wire grids are divided into first wire lines ( 21 ) and second wire lines ( 22 ) having different heights so as to form a dual-period wire-grid structure for achieving better optical performance and exhibiting more global optimization parameters for making modulation of the optical performance thereof more scientific and more flexible. The manufacturing method of the metallic wire grid polarizer of the present invention may make a wire grid structure having layers of different heights and the manufacturing operation is simple.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to the field of display technology, and inparticular to a metallic wire grid polarizer and a manufacturing methodthereof.

2. The Related Arts

Nano-imprint lithography (NIL) provides a breakthrough of the difficultof the traditional photolithography in reducing feature size and offersadvantages of high resolution, low cost, and high throughput. Since1995, nano-imprint lithography has evolved and diversified into variousimprint techniques, which are widely used in various fields includingsemiconductor manufacture, micro-electro-mechanical system (MEMS),biochips, and biomedicine. The essence of the NIL technology is that amold plate is used to transfer a pattern to a backing and the mediumused for the transfer is a polymer film that is extremely thin so thatmeasures, such as hot pressing or radiation, can be used to have thestructure cured and hardened to preserve the transferred pattern. Theentire process includes two processes of imprinting and patterntransferring. According to the difference of the imprinting process, NILcan be classified in three photolithographic techniques, including hotembossing, ultraviolet (UV) curing, and micro contact printing (μCP).

Various devices, such as liquid crystal displays (LCDs) and organiclight-emitting diodes (OLEDs), necessarily involve polarizers. Atraditional polarizer is generally composed of multiple layers of films,among which a core component is a polarization layer, which is often apolyvinyl alcohol (PVA) layer that comprises iodine molecule exhibitingan optical polarization effect. The next are protection layers, whichare located on opposite sides of the polarization layer and aregenerally triacetyl cellulose (TAC) layers that are transparent formaintaining the polarization elements of the polarization layer in astretched condition and preventing loss of moisture from thepolarization element and protecting against external influence. Thepolarizer uses the absorption effect of the dichroic iodine molecules togenerate polarized light. With the advancing of the NIL technology,attempts have been made in making small-sized metallic wire gridstructures to provide a polarization effect for light within thewavelength range of visible light. Since the metallic wire gridstructure absorbs only a small amount of light, one polarized componentof natural light in one direction is reflected and one polarizedcomponent in another direction is allowed to pass, and thus, thereflected light can be recycled and reused through polarizationrotation, providing extreme potential in liquid crystal displays.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a metallic wire gridpolarizer, in which a metallic wire grid is divided into first wirelines and second wire lines that have different heights in order to forma dual-period wire grid structure for providing better optic performanceand having more global optimization parameters for making modulation ofoptical performance thereof more scientific and more flexible.

Another object of the present invention is to provide a manufacturingmethod of a metallic wire grid polarizer, which makes a wire gridstructure having layers of different heights and the manufacturingoperation is simple.

To achieve the above objects, the present invention provides a metallicwire grid polarizer, which comprises a base plate and a plurality ofmetallic wire grids formed on the base plate;

wherein the metallic wire grids are divided into first wire lines andsecond wire lines, such that a plurality of first wire lines and aplurality of second wire lines are alternately arranged on the baseplate in a cyclic or periodic arrangement, the first wire lines having afirst height H1, the second wire lines having a second height, theheights of the first wire lines and the second wire lines satisfying(H1−H2)/H1>10%.

The metallic wire grids have widths that are between 20-150 nm and aspacing distance between two adjacent metallic wire grids is between20-150 nm.

The metallic wire grid polarizer further comprises a buffer layerarranged on the base plate and the plurality of metallic wire grids.

The plurality of metallic wire grids is arranged in an equally spacedmanner on the base plate.

Each of the first wire lines is alternate with each of the second wirelines.

The present invention also provides a manufacturing method of a metallicwire grid polarizer, which comprises the following steps:

(1) providing a metal backing and coating a layer of optical resin on anupper surface of the metal backing;

(2) providing an imprint mold plate and positioning the imprint moldplate on the optical resin to conduct nano-imprinting so as to make theoptical resin that is located on the metal backing forming a pluralityof first photoresist strips and a plurality of second photoresist stripsin an alternate arrangement, wherein a height of the first photoresiststrips is greater than a height of the second photoresist strips;

(3) removing the imprint mold plate and conducting dry etching on themetal backing with the optical resin as a shielding layer so as to forma plurality of metallic wire grids on the metal backing, wherein themetallic wire grids are divided into first wire lines and second wirelines and wherein the first wire lines are formed as corresponding tothe first photoresist strips and the second wire lines are formed ascorresponding to the second photoresist strips so as to form a metallicwire grid polarizer that comprises the base plate and the plurality ofmetallic wire grids on the base plate;

wherein a plurality of first wire lines and a plurality of second wirelines are alternately arranged on the base plate in a cyclic or periodicarrangement, the first wire lines having a first height H1, the secondwire lines having a second height H2, the heights of the first wirelines and the second wire lines satisfying (H1−H2)/H1>10%.

The metallic wire grids have widths that are between 20-150 nm and aspacing distance between two adjacent metallic wire grids is between20-150 nm.

The plurality of metallic wire grids is arranged in an equally spacedmanner on the base plate.

Each of the first wire lines is alternate with each of the second wirelines.

The imprint mold plate provided in step (2) comprises a plurality offirst grid grooves and a plurality of second grid grooves, wherein thefirst grid grooves have a depth that is greater than a depth of thesecond grid grooves and the first photoresist strips and the secondphotoresist strips are formed as respectively corresponding to the firstgrid grooves and the second grid grooves; and step (3) further comprisesremoving a remaining portion of the optical resin after the dry etchingand coating a buffer layer on the plurality of metallic wire grids soformed so that the metallic wire grid polarizer so obtained alsocomprises the buffer layer that is arranged on the base plate and theplurality of metallic wire grids.

The present invention further provides a metallic wire grid polarizer,which comprises a base plate and a plurality of metallic wire gridsformed on the base plate;

wherein the metallic wire grids are divided into first wire lines andsecond wire lines, such that a plurality of first wire lines and aplurality of second wire lines are alternately arranged on the baseplate in a cyclic or periodic arrangement, the first wire lines having afirst height H1, the second wire lines having a second height, theheights of the first wire lines and the second wire lines satisfying(H1−H2)/H1>10%;

wherein the metallic wire grids have widths that are between 20-150 nmand a spacing distance between two adjacent metallic wire grids isbetween 20-150 nm;

further comprising a buffer layer arranged on the base plate and theplurality of metallic wire grids.

The efficacy of the present invention is that the present inventionprovides a metallic wire grid polarizer, which comprises a base plateand a plurality of metallic wire grids formed the base plate. Themetallic wire grids are divided into first wire lines and second wirelines having different heights so as to form a dual-period wire-gridstructure for achieving better optical performance and exhibiting moreglobal optimization parameters for making modulation of the opticalperformance thereof more scientific and more flexible. The presentinvention provides a manufacturing method of a metallic wire gridpolarizer, which makes a wire grid structure having layers of differentheights and the manufacturing operation is simple.

BRIEF DESCRIPTION OF THE DRAWINGS

The features and technical contents of the present invention will bebetter understood by referring to the following detailed description anddrawings of the present invention. However, the drawings are providedfor the purpose of reference and illustration and are not intended tolimit the scope of the present invention.

In the drawing:

FIG. 1 is a schematic view illustrating a structure of a metallic wiregrid polarizer according to the present invention;

FIG. 2 is a flow chart illustrating a manufacturing method of a metallicwire grid polarizer according to the present invention.

FIG. 3 is a schematic view illustrating step 1 of the manufacturingmethod of the metallic wire grid polarizer according to the presentinvention;

FIGS. 4a-4b are schematic views illustrating step 2 of the manufacturingmethod of the TFT array substrate metallic wire grid polarizer accordingto the present invention; and

FIGS. 5-6 are schematic views illustrating step 3 of the manufacturingmethod of the metallic wire grid polarizer according to the presentinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

To further expound the technical solution adopted in the presentinvention and the advantages thereof, a detailed description is given toa preferred embodiment of the present invention with reference to theattached drawings.

Referring to FIG. 1, the present invention provides a metallic wire gridpolarizer, which comprises a base plate 10 and a plurality of metallicwire grids formed on the base plate.

The metallic wire grids are divided into first wire lines 21 and secondwire lines 22, such that a plurality of first wire lines 21 and aplurality of second wire lines 22 are alternately arranged on the baseplate 10 in a cyclic or periodic arrangement. The first wire lines 21have a first height H1, and the second wire lines 22 have a secondheight H2. The heights of the first wire lines 21 and the second wirelines 22 satisfy (H1−H2)/H1>10%.

Specifically, the metallic wire grids have widths that are between20-150 nm and a spacing distance between two adjacent metallic wiregrids is between 20-150 nm.

Specifically, the metallic wire grid polarizer further comprises abuffer layer 30 arranged on the base plate 10 and the plurality ofmetallic wire grids to protect the plurality of metallic wire grids onthe metallic wire grid polarizer.

Specifically, as shown in FIG. 1, to use the metallic wire gridpolarizer, one side of the base plate 10 that is provided with themetallic wire grids serves as a light incident surface to provide aneffect of polarization on light passing therethrough. Particularly, eachof the first wire lines 21 is alternate with each of the second wirelines 22. In other words, the plurality of first wire lines 21 and theplurality of second wire lines 22 are arranged in a cyclic or periodicmanner according the sequence of high, low, high, low. The plurality ofmetallic wire grids is preferably arranged in an equally spaced manneron the base plate 10. Under this condition, a distance between twoadjacent ones of the first wire lines 21 is equal to a distance betweentwo adjacent ones of the second wire lines 22. In addition, theplurality of first wire lines 21 and the plurality of second wire lines22 can be arranged in a cyclic or periodic manner according to differenthigh-low alternating structure, such as a sequence of high, high, low,high, high, low, or a sequence of high, high, low, low, high, high, low,low.

The present invention provides a metallic wire grid polarizer, whichcomprises metallic wire grids divided into first wire lines 21 andsecond wire lines 22 that have different heights so as to provide adual-period wire-grid structure for achieving better optical performanceand exhibiting 15 global optimization parameters for making modulationof the optical performance thereof more scientific and more flexible.

Referring to FIG. 2, in combination with FIG. 1, the present inventionalso provides a manufacturing method of a metallic wire grid polarizer,which comprises the following steps:

Step 1: as shown in FIG. 3, providing a metal backing 100 and coating alayer of optical resin 300 on an upper surface of the metal backing 100.

Step 2: as shown in FIGS. 4a -4 b, providing an imprint mold plate 500and positioning the imprint mold plate on the optical resin 300 toconduct nano-imprinting so as to make the optical resin 300 that islocated on the metal backing 100 forming a plurality of firstphotoresist strips 310 and a plurality of second photoresist strips 320in an alternate arrangement, wherein a height of the first photoresiststrips 310 is greater than a height of the second photoresist strips320.

Specifically, the imprint mold plate 500 provided in Step 2 comprises aplurality of first grid grooves 510 and a plurality of second gridgrooves 520, wherein the first grid grooves 510 have a depth that isgreater than a depth of the second grid grooves 520 and the firstphotoresist strips 310 and the second photoresist strips 310 are formedas respectively corresponding to the first grid grooves 510 and thesecond grid grooves 520.

Step 3: as shown in FIGS. 5-6, removing the imprint mold plate 500 andconducting dry etching on the metal backing 500 with the optical resin300 as a shielding layer so as to form a plurality of metallic wiregrids on the metal backing 500, wherein the metallic wire grids aredivided into first wire lines 21 and second wire lines and wherein thefirst wire lines 21 are formed as corresponding to the first photoresiststrips 310 and the second wire lines 22 are formed as corresponding tothe second photoresist strips 320 so as to form a metallic wire gridpolarizer.

The metallic wire grid polarizer comprises a base plate 10 and aplurality of metallic wire grids on the base plate 10, wherein aplurality of first wire lines 21 and a plurality of second wire lines 22are alternately arranged on the base plate 10 in a cyclic or periodicarrangement. The first wire lines 21 have a first height H1, and thesecond wire lines 22 have a second height H2. The heights of the firstwire lines 21 and the second wire lines 22 satisfy (H1−H2)/H1>10%.

Specifically, Step 3 further comprises removing a remaining portion ofthe optical resin 300 after the dry etching and coating a buffer layer30 on the plurality of metallic wire grids so formed, as what shown inFIG. 1, so that the metallic wire grid polarizer so obtained alsocomprises the buffer layer 30 that is arranged on the base plate 10 andthe plurality of metallic wire grids.

Specifically, the metallic wire grids have widths that are between20-150 nm and a spacing distance between two adjacent metallic wiregrids is between 20-150 nm.

Particularly, each of the first wire lines 21 is alternate with each ofthe second wire lines 22 on the base plate 10. In other words, theplurality of first wire lines 21 and the plurality of second wire lines22 are arranged in a cyclic or periodic manner according the sequence ofhigh, low, high, low. The plurality of metallic wire grids is preferablyarranged in an equally spaced manner on the base plate 10. Under thiscondition, a distance between two adjacent ones of the first wire lines21 is equal to a distance between two adjacent ones of the second wirelines 22. In addition, the plurality of first wire lines 21 and theplurality of second wire lines 22 can be arranged in a cyclic orperiodic manner according to different high-low alternating structure,such as a sequence of high, high, low, high, high, low, or a sequence ofhigh, high, low, low, high, high, low, low.

In summary, the present invention provides a metallic wire gridpolarizer, which comprises a base plate and a plurality of metallic wiregrids formed the base plate. The metallic wire grids are divided intofirst wire lines and second wire lines having different heights so as toform a dual-period wire-grid structure for achieving better opticalperformance and exhibiting more global optimization parameters formaking modulation of the optical performance thereof more scientific andmore flexible. The present invention provides a manufacturing method ofa metallic wire grid polarizer, which makes a wire grid structure havinglayers of different heights and the manufacturing operation is simple.

Based on the description given above, those having ordinary skills ofthe art may easily contemplate various changes and modifications of thetechnical solution and technical ideas of the present invention and allthese changes and modifications are considered within the protectionscope defined by the claims of the present invention.

What is claimed is:
 1. A metallic wire grid polarizer, comprising a baseplate and a plurality of metallic wire grids formed on the base plate;wherein the metallic wire grids are divided into first wire lines andsecond wire lines, such that a plurality of first wire lines and aplurality of second wire lines are alternately arranged on the baseplate in a cyclic or periodic arrangement, the first wire lines having afirst height H1, the second wire lines having a second height, theheights of the first wire lines and the second wire lines satisfying(H1−H2)/H1>10%.
 2. The metallic wire grid polarizer as claimed in claim1, wherein the metallic wire grids have widths that are between 20-150nm and a spacing distance between two adjacent metallic wire grids isbetween 20-150 nm.
 3. The metallic wire grid polarizer as claimed inclaim 1 further comprising a buffer layer arranged on the base plate andthe plurality of metallic wire grids.
 4. The metallic wire gridpolarizer as claimed in claim 1, wherein the plurality of metallic wiregrids is arranged in an equally spaced manner on the base plate.
 5. Themetallic wire grid polarizer as claimed in claim 1, wherein each of thefirst wire lines is alternate with each of the second wire lines.
 6. Amanufacturing method of a metallic wire grid polarizer, comprising thefollowing steps: (1) providing a metal backing and coating a layer ofoptical resin on an upper surface of the metal backing; (2) providing animprint mold plate and positioning the imprint mold plate on the opticalresin to conduct nano-imprinting so as to make the optical resin that islocated on the metal backing forming a plurality of first photoresiststrips and a plurality of second photoresist strips in an alternatearrangement, wherein a height of the first photoresist strips is greaterthan a height of the second photoresist strips; (3) removing the imprintmold plate and conducting dry etching on the metal backing with theoptical resin as a shielding layer so as to form a plurality of metallicwire grids on the metal backing, wherein the metallic wire grids aredivided into first wire lines and second wire lines and wherein thefirst wire lines are formed as corresponding to the first photoresiststrips and the second wire lines are formed as corresponding to thesecond photoresist strips so as to form a metallic wire grid polarizerthat comprises the base plate and the plurality of metallic wire gridson the base plate; wherein a plurality of first wire lines and aplurality of second wire lines are alternately arranged on the baseplate in a cyclic or periodic arrangement, the first wire lines having afirst height H1, the second wire lines having a second height H2, theheights of the first wire lines and the second wire lines satisfying(H1−H2)/H1>10%.
 7. The manufacturing method of the metallic wire gridpolarizer as claimed in claim 6, wherein the metallic wire grids havewidths that are between 20-150 nm and a spacing distance between twoadjacent metallic wire grids is between 20-150 nm.
 8. The manufacturingmethod of the metallic wire grid polarizer as claimed in claim 6,wherein the plurality of metallic wire grids is arranged in an equallyspaced manner on the base plate.
 9. The manufacturing method of themetallic wire grid polarizer as claimed in claim 6, wherein each of thefirst wire lines is alternate with each of the second wire lines. 10.The manufacturing method of the metallic wire grid polarizer as claimedin claim 6, wherein the imprint mold plate provided in step (2)comprises a plurality of first grid grooves and a plurality of secondgrid grooves, wherein the first grid grooves have a depth that isgreater than a depth of the second grid grooves and the firstphotoresist strips and the second photoresist strips are formed asrespectively corresponding to the first grid grooves and the second gridgrooves; and step (3) further comprises removing a remaining portion ofthe optical resin after the dry etching and coating a buffer layer onthe plurality of metallic wire grids so formed so that the metallic wiregrid polarizer so obtained also comprises the buffer layer that isarranged on the base plate and the plurality of metallic wire grids. 11.A metallic wire grid polarizer, comprising a base plate and a pluralityof metallic wire grids formed on the base plate; wherein the metallicwire grids are divided into first wire lines and second wire lines, suchthat a plurality of first wire lines and a plurality of second wirelines are alternately arranged on the base plate in a cyclic or periodicarrangement, the first wire lines having a first height H1, the secondwire lines having a second height, the heights of the first wire linesand the second wire lines satisfying (H1−H2)/H1>10%; wherein themetallic wire grids have widths that are between 20-150 nm and a spacingdistance between two adjacent metallic wire grids is between 20-150 nm;further comprising a buffer layer arranged on the base plate and theplurality of metallic wire grids.
 12. The metallic wire grid polarizeras claimed in claim 11, wherein the plurality of metallic wire grids isarranged in an equally spaced manner on the base plate.
 13. The metallicwire grid polarizer as claimed in claim 11, wherein each of the firstwire lines is alternate with each of the second wire lines.